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Biomicrofluidics / Volume 5 / Issue 4 / FABRICATION AND LABORATORY METHODS

Biomicrofluidics 5, 046503 (2011); http://dx.doi.org/10.1063/1.3659016 (8 pages)

Sealing SU-8 microfluidic channels using PDMS

Zhiyi Zhang1, Ping Zhao1, Gaozhi Xiao1, Benjamin R. Watts2, and Changqing Xu2

1Institute for Microstructural Science, National Research Council Canada, Ottawa, Ontario K1A 0R6, Canada
2Department of Engineering Physics, McMaster University, Hamilton, Ontario L8S 4L7, Canada

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(Received 27 July 2011; accepted 13 October 2011; published online 9 November 2011)

A simple method of irreversibly sealing SU-8 microfluidic channels using PDMS is reported in this paper. The method is based on inducing a chemical reaction between PDMS and SU-8 by first generating amino groups on PDMS surface using N2 plasma treatment, then allowing the amino groups to react with the residual epoxy groups on SU-8 surface at an elevated temperature. The N2 plasma treatment of PDMS can be conducted using an ordinary plasma chamber and high purity N2, while the residual epoxy groups on SU-8 surface can be preserved by post-exposure baking SU-8 at a temperature no higher than 95 °C. The resultant chemical bonding between PDMS and SU-8 using the method create an interface that can withstand a stress that is greater than the bulk strength of PDMS. The bond is permanent and is long-term resistant to water. The method was applied in fabricating SU-8 microfluidi-photonic integrated devices, and the obtained devices were tested to show desirable performance.

© 2011 Crown

Article Outline

  1. INTRODUCTION
  2. EXPERIMENTAL
  3. RESULTS AND DISCUSSION
  4. CONCLUSION

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KEYWORDS and PACS

Keywords

bioMEMS, bio-optics, cellular biophysics, integrated optics, materials preparation, microfluidics, micro-optomechanical devices, plasma materials processing, polymer structure

PACS

  • 87.80.Ek

    Mechanical and micromechanical techniques

  • 42.82.-m

    Integrated optics

  • 85.85.+j

    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

  • 87.17.-d

    Cell processes

  • 87.50.wf

    Biophysical mechanisms of interaction

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3659016

PUBLICATION DATA

ISSN

1932-1058 (online)

Publisher

$abstract.society.value is a Member of CrossRef Crown

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